Facilities and Equipment
Equipment List
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(양면 정렬 마이크로패턴 노광장비) Dual Mask Aligner
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(무라돈 환경 전자빔 증착 시스템) E-beam evaporator
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E-beam evaporator
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유도 결합 플라즈마 질량분석기 Inductively Coupled Plasma Mass Spectrometer (ICP-MS)
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(유도 결합 플라즈마 방식 반응성 이온 식각장치와 식각완료면 정밀측정기) Inductively Coupled Plasma Reactive Ion Etcher (ICP-RIE) and End Point Detector (EPD)
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(칼피셔 수분측정기) Karl-Fisher titrator
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(키로플로스 단결정 육성장치) Kyropoulos single crystal grower
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Kyropoulos single crystal grower
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(맥동관 냉동기 기반의 저진동 4 K 냉동기) Low vibration Pulse tube base 4 K refrigerator
Center for UndergroundPhysics (CUP)
IBS Center for Underground Physics, IBS, Experiment building, 1st floor, 55, Expo-ro, Yuseong-gu, Daejeon, Korea (34126)
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