Model | - Synwiz 2017 - Customized model |
---|---|
Operating time | 09:00 ~ 18:00 |
Location | IBS HQ C169 clean room 1000 (deposition room) |
inquiry |
1. Equipment name : E-beam evaporator (무라돈 환경 전자빔 증착 시스템)
2. Manufacture and Model
- Synwiz 2017
- Customized model
3. Purpose : This equipment is used to measurement for low temperature detectors. Deposition thin films for cryogenic crystal detectors and light detectors in a Radon free environment.
4. Specification and performance
(1) Process chamber
- 3 level of UHV (cryo, turbo, rough pump)
- large loading space : simultaneous deposition of 4 ~ 5 samples
(individual sample of maximum 60 (D) × 90 (H) mm)
- rotational (3-axes) sample holder including water cooling system
(2) source chamber
- Dual E-beam gun
- separated with process chamber by gate valve
(3) load-rock chamber and glove box
- minimization of the surface contamination by Radon and moisture
- nitrogen charge type (less than 1 ppm of moisture content with dry trap)
5. Location and Picture :
- IBS head quarter, C169 clean room 1000 (deposition room)