Model | - Olympus, 2014 - model OLS4100 |
---|---|
Operating time | 01:00 ~ 01:00 |
Location | IBS HQ (C171 Photo-lithography room) |
inquiry |
1. Equipment name : 3D laser microscope (3D 레이저 현미경)
2. Manufacture and Model
- Olympus, 2014
- model OLS4100
3. Purpose : This equipment is used to measurement for low temperature detectors. It is a 3D laser microscope for measuring multi-layer thin film patterns.
4. Specification and performance
This equipment is a laser scanning microscope designed for surface measurements at 10 nm resolutions and non-contact 3D observations. It consists of a customized optical system and high numerical apertures. A 405 nm laser within the optical system ensures superior performance.
The presence of a short-wavelength 405nm laser and a high aperture objective lens provides an impressive X-Y resolution of 0.12 µm to perform submicron measurements at the surface of the sample. A precise 0.8 nm resolution linear scale and software algorithms such the I-Z curve can help OLS4100 resolve 10nm height differences.
5. Location and Picture :
- IBS head quarter, C171 Photo-lithography room