No | Name | Model | Location | Superuser |
---|---|---|---|---|
30 | 3D laser microscope (3D 레이저 현미경) |
- Olympus, 2014 - model OLS4100 |
IBS HQ (C171 Photo-lithography room) |
|
29 | Adiabatic demagnetization Refrigerator (단열탈자 냉동기) |
- High Precision Devices (2014) - 103 Rainier |
IBS HQ (ADR lab) |
|
28 | Annealing machine for large volume of powder (대량 파우더산화열처리장치) |
- 다다코리아, 2018년 9월 - Customized model |
IBS HQ C173 Clean room 1000 |
|
27 | Annealing machine for powder (파우더산화열처리장치) |
- 다다코리아, 2017년 7월 - Customized model |
IBS HQ C173 Clean room 1000 |
|
26 | Bridgman single crystal grower (브리지만 단결정 육성장치) |
- 대흥과학, 2014-02-19 - model DH-BF60 |
IBS HQ | C182 Crystal growing lab (Ky method) |
25 | Cryogen-Free Refrigerator System (무 액체 냉매 희석식 냉동기) |
- Leiden Cryogenics, 2015 - CF-81-1400 Maglev |
YangYang underground laboratory | |
24 | Czochralski single crystal grower (초크랄스키 단결정 육성장치 (CZ01, CZ02)) |
- TPS, 2014-04-11 (CZ01), TPS, 2016-05-12 (CZ02) - model TPSF03C (CZ01), CZG2414 (CZ02) |
IBS HQ | C182 Crystal growing lab (Ky method) |
23 | DI (Deionized) water supply system | - PNC Tech, 2014 - customized model |
IBS HQ | |
22 | Dicing saw (웨이퍼 절단기) |
- Disco, 2017 - model DAD323 |
IBS HQ C169 clean room 1000 (deposition room) |
|
21 | Dual Mask Aligner (양면 정렬 마이크로패턴 노광장비) |
- SUSS MicroTec Lithography GmbH , 2016 - model MASK ALIGNER MA6 |
IBS HQ (C171 Photo-lithography room) |
|
20 | E-beam evaporator (무라돈 환경 전자빔 증착 시스템) |
- Synwiz 2017 - Customized model |
IBS HQ C169 clean room 1000 (deposition room) |
|
19 | High purity gas supply system | - Wiz technology, 2018 - customized model |
IBS HQ C 147 utility room |
|
18 | Inductively Coupled Plasma Mass Spectrometer (ICP-MS) 유도 결합 플라즈마 질량분석기 |
- Agilent Technologies, 2015 - Agilent 7900 ICP-MS |
C177, ICP-MS | |
17 | Inductively Coupled Plasma Reactive Ion Etcher (ICP-RIE) and End Point Detector (EPD) (유도 결합 플라즈마 방식 반응성 이온 식각장치와 식각완료면 정밀측정기) |
- SAMCO Inc. 2016 - model RIE-200iP |
IBS HQ C169 clean room 1000 (deposition room) |
|
16 | Karl-Fisher titrator (칼피셔 수분측정기) |
- Mettler Toledo, 2018년 5월 - Compact KF Coulometers, C20S - Gas phase extraction oven, DO308 |
IBS HQ C179 Chemical Process lab |
|
15 | Kyropoulos single crystal grower (키로플로스 단결정 육성장치) |
- TPS, 2014-05-18 - model TPSGF05K |
IBS HQ | C182 Crystal growing lab (Ky method) |
14 | Low temperature PECVD (저온플라즈마 화학기상증착장비) |
- Samco Inc. 2018 - model PD-100ST |
IBS HQ C169 clean room 1000 (deposition room) |
|
13 | Low vibration Pulse tube base 4 K refrigerator (맥동관 냉동기 기반의 저진동 4 K 냉동기) |
- Seongwoo instrument (2014) - Customized model |
IBS HQ (ADR lab) |
|
12 | Manual Die Bonder (수동 다이 본더) |
- TPT, 2017 - HD10 |
IBS HQ (C187 Microscope lab) |
|
11 | Mask-less micro pattern generator (마스크리스 마이크로 패턴 생성기) |
Heidelberg Instruments, 2016 model MLA 100 |
IBS HQ, C171 Photo-lithography room |