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To explore new physics phenomena of low dimensional materials
with a special emphasis on two-dimensional layered structures
Glove box cluster system
| Model | ATSC-Cluster-150 |
|---|---|
| Operating time | |
| Location | 86291 |
| inquiry |
Taesoo Kim 010-8549-6164 rlaxotn0822@gmail.com |
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To mechanically exfoliate or synthesize 2D materials using CVD chamber in order to fabricate the related devices inside glove boxes.
O2 content : Less than 1 ppm
H2O content : Less than 1 ppm
Atmospheric gas : Ar (5N), kept as ~2 atm
Ante chamber pressure : ~mtorr by rotary oil pump
Pattern generator - Laser wevalength: 435 nm on normal PR (GXR 601, PR 4330), minimum pattern size ~ 1 um
IBS Center for Integrated Nanostructure Physics , Office 86371, N Center (BIdg. 86)Sungkyunkwan University, 2066, Seobu-ro, Jangan-gu, Suwon-si, Gyeonggi-do
Copyright(c) 2014 Center for Integrated Nanostructure Physics at IBS. All Rights Reserved.
