Center for Integrated Nanostructure Physics

Alpha step measures step height roughness and waviness in a variety of applications.

It features the ability to measure precision step heights from under 10 angstroms to as large as 1.2 millimeters.

A. System configuration
1. Step height precision scanner
2. L-stylus stylus 2 [um] Radius 60 
3. Manual precision X-Y stage 140[mm] diameter
4. Isolation hood 
5. Software operation system hardware
6. Softcopy user manual  CD set
7. 17” TFT LCD monitor
8. Integrated network card

B. Specification
1. General performance :
(1). Scan length : 30 [mm]
(2). Scan speed : 5 [um/sec] to 2000 [um/ sec] 
(4). Sampling rate : Max 120000
(5). Vertical range / resolution : 0.38 [Angstrom]
(6). Stylus force : Adjustable between 0.03~10 [mg]

2. Repeatability :
Step height repeatability 1σ : 0.5 [nm] in 1 [um] range

3. Sample handling :
(1) 80 [mm] x 20 [mm] stage moving 
(2) Theta : 360[o]
(3) 21 [mm] maximum sample thickness
(4) 1 [Kg] maximum sample weight

4. Leveling :
- Automatic data leveling
- Software-assisted stage leveling

5. Data analysis / output
(1) Automatic cursor positioning
(2) Database manager : Save 
(3) Profile stitching
(4) Win XP /3.2 GHz Pentium 4 Microprocessor /CDRW
C. Remarks :
(1) Installation and basic operation training by the qualified service engineer.