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CVD system (VSe2)

equipment explanation
Model Customized
Operating time SUN(00:00~24:00)
MON(00:00~24:00)
TUE(00:00~24:00)
WED(00:00~24:00)
THU(00:00~24:00)
FRI(00:00~24:00)
SAT(00:00~24:00)
Location 86591
inquiry Tuan Dung
010-9486-2804
Reservation

Notice

 

Available Time // Except 12:00~18:00 on every Mon~Thur.

 

Notice // If you want to have training for using this equipment, please contact Super-user.

 

Current Status // Now on operation.

5 furnace intergrated system with Ar, H2 gas supplyment system. This machine is specially deginated to controll temperature for each region.


2 zone furnace system
Moving furnace system
Temperature range : 0~1100['C]
Pressure range : 10-4 [torr] to 1[ATM]
Ar (1000[sccm]), H2 (100[sccm]), N2 (1000[sccm])

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