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CVD system (h-BN)

equipment explanation
Model Customized
Operating time SUN(00:00~24:00)
MON(00:00~24:00)
TUE(00:00~24:00)
WED(00:00~24:00)
THU(00:00~24:00)
FRI(00:00~24:00)
SAT(00:00~24:00)
Location 86591
inquiry Andrew Ben-Smith
Reservation

Notice

 

Available Time // Except 12:00~18:00 on every Mon~Thur.

 

Notice // If you want to have training for using this equipment, please contact Super-user.

 

Current Status // Now on operation.

Speically deginated for synthesizing hexagonal boron nitrde. One zone furnace with vacuum system.


For supplying borazine precursor, this machine has bubbler system which is used for carrying liquid precursor to chamber.
1 zone furnace system,
Temperature range : 0~1100['C]
Pressure range : 10-4 [torr] to 1[ATM]
Cold trap system
Bubbler system
Ar (1000[sccm]), H2 (100[sccm]), N2 (1000[sccm]), CH4(5[sccm])

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